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Process Gas Equipment

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Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

  • 2D/3D CAD
    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system. Click here for 2D/3D CAD
SeriesTypeApplicationBody materialConnection typeConnection size
AP/SLSingle stageDistribution (Compact)316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
AP/SLSingle stageDistribution316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
1/2'', 3/4''
AP/SLSingle stageBulk gas316L SSFace seal
Tube weld		1/2'', 3/4'', 1''
AP/SLSingle stageSource316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
1/2'', 3/4''
AP/SLSingle stageSub-atmospheric pressure316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
1/2'', 3/4''
APTwo stageSource316L SS
secondary remelt		Face seal
Tube weld		1/4''，3/8''
AZSingle stageDistribution316L SSFace seal
Tube weld		1/4'', 3/8''
1/2''
AZSingle stageSource316L SSFace seal
Tube weld		1/4'', 3/8''
1/2''
AZSingle stageSub-atmospheric pressure316L SSFace seal
Tube weld		1/4'', 3/8''
1/2''

Regulator/Back Pressure Regulator for General Applications AK/BP

SeriesTypeApplicationBody materialConnection typeConnection size
AKSingle stageDistribution316 SS
or Brass		NPT female, Compression1/4'', 3/8''
1/2''
AKSingle stageSource316 SS
or Brass		NPT female, Compression1/4'', 3/8''
1/2''
AKSingle stageSub-atmospheric pressure316 SS
or Brass		NPT female, Compression1/4'', 3/8''
1/2''
AKTwo stageSource316 SS
or Brass		NPT female, Compression1/4''
BPBack pressure regulator―316 SS
or Brass		NPT female, Compression1/4''

Diaphragm Valve for Ultra High Purity AZ

  • 2D/3D CAD
    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system. Click here for 2D/3D CAD
SeriesTypeBody materialConnection typeConnection size
AZAir operated type316L SSFace seal
Tube weld		1/4''
3/8''
1/2
AZManually operated316L SSFace seal
Tube weld		1/4''
3/8''
1/2

Check Valve/Vacuum Generator/Flow Switch AP

    [Check valve]
    ・Fluid backflow is prevented by back pressure.
    ・Unique design with only one moving part in the gas stream, an O-ring
    ・Springless structure suppresses particle generation by vibration or chattering and pressure fluctuations on the downstream side

    [Vacuum generator]
    ・Vacuum generation equipment
    ・Applicable to the exhaustion of unnecessary gas remaining inside the piping during gas cylinder replacement

    [Flow switch]
    ・Detects excess flow above a given flow rate caused by pipe breakage, etc.
SeriesTypeBody materialConnection typeConnection size
APCheck valve316L SS secondary remeltFace seal
Tube weld		1/4'', 3/8''
APVacuum generator316L SSFace seal
Tube weld		1/4'', 3/8''
APFlow switch316L SS secondary remelt
316L SS		Face seal
Tube weld		1/2'', 3/4''

Diaphragm Valve for General Applications AK

    ・Rc, R, and NPT connections have been added to the series.
    ・For a wide variety of applications from semiconductor to general
    ・Cleaned for O2 service
    ・Compact and lightweight due to the shortening of the actuator (AK3542/4542)
    ・M5 actuation port (AK3542/4542)
    ・Compact and lightweight due to the modifying of the knob design (AK3652/4652)
    ・The knob features a unique design that combines a scalloped round knob with a raised rectangular section to provide two choices of gripping. (AK3652/4652)
  • 2D/3D CAD
    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system. Click here for 2D/3D CAD
SeriesTypeBody materialConnection typeConnection size
AKAir operated type316 SSCompression
Rc, R, NPT		1/4''，3/8''
AKManually operated316 SSCompression
Rc, R, NPT		1/4''，3/8''

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