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口碑最好的彩票平台.十大正规彩票安全平台:WEB Catalog
» 口碑最好的彩票平台.十大正规彩票安全平台:High Vacuum Equipment
» High Vacuum Valves
High Vacuum Valves
Aluminum High Vacuum Angle Valve XL□
-
・High fluorine resistance
・Minimal outgassing
・Minimal contamination from heavy metals
∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
discontinued in September 2017.
Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
口碑最好的彩票平台.十大正规彩票安全平台:Safety Instructions 口碑最好的彩票平台.十大正规彩票安全平台:System Configuratiꩲon/Series Variations 口碑最好的彩票平台.十大正规彩票安全平台:Auto Sw♛itches Common Specifications
口碑最好的彩票平台.十大正规彩票安全平台:Green Procurement (RoHS)
口碑最好的彩票平台.十大正规彩票安全平台:Green Procurement (RoHS)
Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
---|---|---|---|---|---|
XLA | Air operated | Single acting (N.C.) | Bellows seal | Dust-free Cleaned | 16 to 160 |
XLAV (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows seal | Dust-free Cleaned | 16 to 160 |
XLC | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 16 to 160 |
XLCV (With solenoid valve) | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 16 to 80 |
XLF | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation High operating cycles | 16 to 160 |
XLFV (With solenoid valve) | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation High operating cycles | 16 to 160 |
XLG | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles | 16 to 160 |
XLGV (With solenoid valve) | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles | 16 to 80 |
XLD | Air operated | Single acting (N.C.) | Bellows/O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded | 25 to 160 |
XLDV (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows/O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded | 25 to 160 |
XLH | Manual | Manual | Bellows seal | Dust-free Cleaned | 16 to 50 |
XLS | Electromagnetic | Single acting (N.C.) | (Bellows balance) | For portable equipment not requiring air | 16, 25 |
Features
■Aluminum High Vacuum Angle Valve
口碑最好的彩票平台.十大正规彩票安全平台:
■Aluminum bodied
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
口碑最好的彩票平台.十大正规彩票安全平台:
Lightweight, Compact
Low outgassing
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or
Cr (chrome) and a low sputtering yield also helps to minimize
heavy metal contamination of semiconductor wafers.
■Possible to replace the bellows
(Bellows seal type)
Bellows assembly can be replaced which reduces maintenance costs and waste materials.
口碑最好的彩票平台.十大正规彩票安全平台:
(Bellows seal type)
■A heat-resistant 2-color indicator solid state auto switch is available for models with a heater. (Option) New
・Ambient temperature: Max. 150° C (Sensor)
・2-color indicator