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High Vacuum Valves

Aluminum High Vacuum Angle Valve XLA/C/F/G

SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLA-2Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		16 to 80
XLAV-2
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		16 to 80
XLC-2Air
operated		Double
acting		Bellows sealDust free,
Cleaned		16 to 80
XLF-2Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation,
High operating cycles		16 to 80
XLFV-2
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation,
High operating cycles		16 to 80
XLG -2Air
operated		Double
acting		O-ring sealHigh-speed operation,
High operating cycles		16 to 80

Features

■Aluminum High Vacuum Angle Valve
■Aluminum bodied
Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.


Lightweight, Compact

Large conductance, small body, excellent resistance against fluorine corrosion (body)
Low outgassing Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
■Possible to replace the bellows
(Bellows seal type)
Bellows assembly can be replaced which reduces maintenance costs and waste materials.
■A model with a solenoid valve has been added. New



■A heat-resistant 2-color indicator solid state auto switch is available for models with a heater. (Option) New

・Ambient temperature: Max. 150° C (Sensor)
・2-color indicator

■Heater is available for option.


For 100/120° C

■Auto switches are mountable from 4 directions.


■High Vacuum Angle Valve Series Variations

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